Wafer drying device based on Fab

The wafer drying device based on the Fab comprises a device body, the device body comprises a base, a storage box and a control box, the storage box is installed on the top of the base, and the control box is installed on the top of the storage box; the storage box is of a rectangular structure, the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU CHUQUN, PAN JINGBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM HEATING LIGHTING MECHANICAL ENGINEERING WEAPONS
Online-Zugang:	Volltext bestellen
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