Wafer conveying and collecting device
The utility model discloses a wafer conveying and collecting device, and belongs to the technical field of plasmas. The utility model solves the problem that the conventional plasma equipment needs to be equipped with a mechanical arm to convey and store wafers, so that the operation is tedious. The...
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| creator | YUE WEIPING XIE XINGGUANG LIU TAO |
| description | The utility model discloses a wafer conveying and collecting device, and belongs to the technical field of plasmas. The utility model solves the problem that the conventional plasma equipment needs to be equipped with a mechanical arm to convey and store wafers, so that the operation is tedious. The device comprises a C-shaped opening and closing mechanism and a material receiving box, the C-shaped opening and closing mechanism comprises two connecting pieces and rubber pads, the rubber pads are arranged on the inner side walls of the connecting pieces, and wafer limiting areas are defined by the upper surfaces of the rubber pads and the inner side walls of the two connecting pieces; one end of the connecting piece is movably connected, and the other end is an opening-closing end; and the opening and closing end faces the inlet of the receiving box. According to the utility model, the C-shaped opening and closing mechanism transmits the wafer to carry out plasma reaction, and after the C-shaped opening and cl |
| format | Patent |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Wafer conveying and collecting device |
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