Auxiliary device for assembling and disassembling electrode on etching machine table
The utility model provides an auxiliary device for assembling and disassembling an upper electrode on an etching machine table, the auxiliary device comprises a movable support and a bearing seat which is movably installed on the support and can be adjusted in a lifting mode, and the bearing seat is...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides an auxiliary device for assembling and disassembling an upper electrode on an etching machine table, the auxiliary device comprises a movable support and a bearing seat which is movably installed on the support and can be adjusted in a lifting mode, and the bearing seat is used for bearing a bearing piece of the upper electrode so as to assist assembling and disassembling of the upper electrode. The supporting seat on the support is used for supporting the supporting piece with the upper electrode, so that an engineer can conveniently mount or dismount a screw of the supporting piece, horizontal movement of the upper electrode can be realized by moving the support, and vertical movement of the upper electrode can be realized by adjusting the supporting seat in a lifting manner; the upper electrode can be assembled and disassembled by only one engineer, manual supporting is not needed, labor is saved, convenience is achieved, and the assembling and disassembling efficiency of the upp |
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