Equipment for metal evaporation filtering

The utility model relates to equipment for metal evaporation filtering. The technical problem that in the prior art, oxidized metal particles and metal atoms generated in the heating and evaporating process of metal cannot be separated, and normal work of other equipment is affected is solved. The e...

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Hauptverfasser: SUN HAO, LI MUCI, DENG RONGBIN, ZHAO LIANG, ZHANG FAN
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Sprache:chi ; eng
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creator SUN HAO
LI MUCI
DENG RONGBIN
ZHAO LIANG
ZHANG FAN
description The utility model relates to equipment for metal evaporation filtering. The technical problem that in the prior art, oxidized metal particles and metal atoms generated in the heating and evaporating process of metal cannot be separated, and normal work of other equipment is affected is solved. The equipment for metal evaporation filtering comprises a point source crucible, the point source crucible is a hollow container, a heating device is arranged in the side wall of the point source crucible, a nozzle is arranged in the center of one end of the point source crucible and communicated with the interior of the point source crucible, a filtering device for separating the internal space is arranged in the point source crucible, and the point source crucible is provided with an air inlet and an air outlet. A plurality of bent filtering gaps which are communicated up and down are formed in the filtering device. The device has the advantages that oxidized metal particles and metal atoms generated in the heating an
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The technical problem that in the prior art, oxidized metal particles and metal atoms generated in the heating and evaporating process of metal cannot be separated, and normal work of other equipment is affected is solved. The equipment for metal evaporation filtering comprises a point source crucible, the point source crucible is a hollow container, a heating device is arranged in the side wall of the point source crucible, a nozzle is arranged in the center of one end of the point source crucible and communicated with the interior of the point source crucible, a filtering device for separating the internal space is arranged in the point source crucible, and the point source crucible is provided with an air inlet and an air outlet. A plurality of bent filtering gaps which are communicated up and down are formed in the filtering device. 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The technical problem that in the prior art, oxidized metal particles and metal atoms generated in the heating and evaporating process of metal cannot be separated, and normal work of other equipment is affected is solved. The equipment for metal evaporation filtering comprises a point source crucible, the point source crucible is a hollow container, a heating device is arranged in the side wall of the point source crucible, a nozzle is arranged in the center of one end of the point source crucible and communicated with the interior of the point source crucible, a filtering device for separating the internal space is arranged in the point source crucible, and the point source crucible is provided with an air inlet and an air outlet. A plurality of bent filtering gaps which are communicated up and down are formed in the filtering device. 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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TRANSPORTING
title Equipment for metal evaporation filtering
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