Wafer measuring mechanism

Wafer measuring mechanism

The utility model relates to the technical field of wafer production, in particular to a wafer measuring mechanism. The wafer measuring mechanism comprises a wafer box outer cover, a wafer box base, a lifting frame, a swing rod driving module, a lifting driving module and a box opener body base, the...

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Hauptverfasser: CHE SU, GUO QIANG, HE YUANYI, ZHU HONGBIAO, ZHAO JINLEI, JIANG TIECHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator CHE SU
GUO QIANG
HE YUANYI
ZHU HONGBIAO
ZHAO JINLEI
JIANG TIECHENG
description The utility model relates to the technical field of wafer production, in particular to a wafer measuring mechanism. The wafer measuring mechanism comprises a wafer box outer cover, a wafer box base, a lifting frame, a swing rod driving module, a lifting driving module and a box opener body base, the lifting driving module and the wafer box base are installed on the box opener body base, and the wafer box base can rotate; the lifting lifting frame is arranged on the outer side of the wafer box base, and the upper end and the lower end of the lifting lifting frame are connected with the wafer box outer cover and the lifting driving module respectively; and two groups of swing rod driving modules are arranged on the left side and the right side of the lifting frame, are respectively connected with the optical fiber transmitting end and the optical fiber receiving end, and are respectively used for driving the optical fiber transmitting end and the optical fiber receiving end to be horizontally close to or far aw
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Wafer measuring mechanism
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