Residual gas analyzer device capable of preventing corrosion of corrosive gas

Residual gas analyzer device capable of preventing corrosion of corrosive gas

The utility model provides a residual gas analyzer device capable of preventing corrosion of corrosive gas. The residual gas analyzer device comprises an ion source part, a quadrupole rod part, a detector part, an electric vacuum flange and an electric control system, the ion source part, the quadru...

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Hauptverfasser: JING JIARONG, YU JIAJIA, SHEN HUI, PANG JUNDE, SHI WEI, REN WEISONG, ZHOU XU
Format: Patent
Sprache:chi ; eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator JING JIARONG
YU JIAJIA
SHEN HUI
PANG JUNDE
SHI WEI
REN WEISONG
ZHOU XU
description The utility model provides a residual gas analyzer device capable of preventing corrosion of corrosive gas. The residual gas analyzer device comprises an ion source part, a quadrupole rod part, a detector part, an electric vacuum flange and an electric control system, the ion source part, the quadrupole rod part and the detector part are sequentially connected, the detector part is connected with the electric control system, and the electric vacuum flange is arranged between the electric control system and the detector part; the quadrupole rod part comprises a shielding sleeve and a quadrupole rod; the shielding sleeve is arranged on the outer side of the quadrupole rod; the detector part comprises a metal safety cover and a detector; and the metal safety cover is arranged on the outer side of the detector. According to the residual gas analyzer device, the service life of the existing residual gas analyzer device in a corrosive gas environment is prolonged by carrying out anti-corrosion design on components
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Residual gas analyzer device capable of preventing corrosion of corrosive gas
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