Baffle mechanism for plane target of vacuum coating equipment

The utility model discloses a baffle plate mechanism for a plane target of vacuum coating equipment, which comprises a supporting bottom plate, a baffle plate assembly and a coating assembly are arranged on the upper surface of the supporting bottom plate, and the coating assembly comprises a vacuum...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG YUANCAI, ZHANG PENGKUN, XIONG KAI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a baffle plate mechanism for a plane target of vacuum coating equipment, which comprises a supporting bottom plate, a baffle plate assembly and a coating assembly are arranged on the upper surface of the supporting bottom plate, and the coating assembly comprises a vacuum furnace body and a plane target main body; the baffle assembly comprises a positioning supporting table, a driving component is arranged at the top end of the positioning supporting table, the top end of the driving component is connected with a movable baffle, and the driving component is in transmission connection with a servo motor. And the driving component comprises a driving rotating shaft, second rotating connecting rods are fixedly installed at the two ends of the driving rotating shaft, a rotating limiting arm is rotationally connected to one side of each second rotating connecting rod, and a first rotating connecting rod is rotationally connected to one end of each rotating limiting arm. The servo motor