Optical observation window structure

The utility model discloses an optical observation window structure, and relates to the field of semiconductor manufacturing, the optical observation window structure comprises an optical observation window and a mounting base station, one side, close to a cavity side wall, of the mounting base stat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CAO CHUNSHENG, LUAN JIANFENG, LI SHIPENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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