Optical observation window structure

Optical observation window structure

The utility model discloses an optical observation window structure, and relates to the field of semiconductor manufacturing, the optical observation window structure comprises an optical observation window and a mounting base station, one side, close to a cavity side wall, of the mounting base stat...

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Hauptverfasser: CAO CHUNSHENG, LUAN JIANFENG, LI SHIPENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator CAO CHUNSHENG
LUAN JIANFENG
LI SHIPENG
description The utility model discloses an optical observation window structure, and relates to the field of semiconductor manufacturing, the optical observation window structure comprises an optical observation window and a mounting base station, one side, close to a cavity side wall, of the mounting base station is provided with an optical channel communicated with the optical observation window, the other side of the mounting base station is provided with a clamping groove communicated with the optical channel, and a lens is arranged in the clamping groove; one side, far away from the cavity side wall, of the mounting base is connected with an optical cable support, the optical cable support shields the clamping groove, and a through hole communicated with the clamping groove is formed in the optical cable support; the optical cable support is connected with an optical receiving piece matched with external optical analysis equipment, and the receiving face of the optical receiving piece faces the optical channel. An e
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Optical observation window structure
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