Trichlorosilane synthesis tail gas recovery device

The utility model discloses a trichlorosilane synthesis tail gas recovery device which comprises a recovery tank, a support frame is arranged at the lower end of the recovery tank, and a recovery condensation mechanism is arranged in the recovery tank; the recycling and condensing mechanism comprise...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GAO SHENLIANG, GUO YUJIAO, YU SHUKUI, WANG QIANG, JIA ANBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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