Trichlorosilane synthesis tail gas recovery device

Trichlorosilane synthesis tail gas recovery device

The utility model discloses a trichlorosilane synthesis tail gas recovery device which comprises a recovery tank, a support frame is arranged at the lower end of the recovery tank, and a recovery condensation mechanism is arranged in the recovery tank; the recycling and condensing mechanism comprise...

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Hauptverfasser: GAO SHENLIANG, GUO YUJIAO, YU SHUKUI, WANG QIANG, JIA ANBO
Format: Patent
Sprache:chi ; eng
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PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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creator GAO SHENLIANG
GUO YUJIAO
YU SHUKUI
WANG QIANG
JIA ANBO
description The utility model discloses a trichlorosilane synthesis tail gas recovery device which comprises a recovery tank, a support frame is arranged at the lower end of the recovery tank, and a recovery condensation mechanism is arranged in the recovery tank; the recycling and condensing mechanism comprises a limiting sleeve, a communicating pipe, a connecting pipe, a filtering sleeve, a mounting sleeve, a filtering part and a condensing and collecting part; the limiting sleeve is arranged at the inner top of the recycling tank, the communicating pipe is arranged in the recycling tank, the connecting pipe is connected to the communicating pipe, the communicating pipe is sleeved with the filtering sleeve, the installing sleeve is arranged in the recycling tank, the filtering part is arranged in the installing sleeve, and the filtering part is arranged in the installing sleeve. And the condensation collection part is arranged in the recovery tank. The tail gas is filtered and cooled to-29 DEG C to-30 DEG C, and the ta
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language chi ; eng
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subjects PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
title Trichlorosilane synthesis tail gas recovery device
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