Laser box, plane grating measuring system and photoetching machine
The utility model provides a laser box, a plane grating measuring system and a photoetching machine, and relates to the technical field of semiconductor manufacturing equipment. The laser box can be arranged on a workpiece table and comprises a box body, a single-frequency laser and a photoelectric...
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| creator | YANG YUEZHU YAO YAO CHANG MISHENG FAN YUJIAO |
| description | The utility model provides a laser box, a plane grating measuring system and a photoetching machine, and relates to the technical field of semiconductor manufacturing equipment. The laser box can be arranged on a workpiece table and comprises a box body, a single-frequency laser and a photoelectric conversion module, the single-frequency laser is used for generating and emitting laser, and the photoelectric conversion module is used for receiving and processing measurement optical signals passing through a sensor. In the laser box, the single-frequency laser performs homodyne measurement, so that the non-linear error of a measurement result is small, a frequency shift module and the like are not included, the structure is simple, the laser box is convenient to miniaturize, the laser box is convenient to arrange on a workpiece table, and the space outside the workpiece table can be saved so as to arrange other parts; in addition, the laser box is compact in structural arrangement, the distance of the laser emi |
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| language | chi ; eng |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TARIFF METERING APPARATUS TESTING |
| title | Laser box, plane grating measuring system and photoetching machine |
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