Silicon wafer removing device and silicon wafer conveying system

The utility model discloses a silicon wafer rejecting device and a silicon wafer conveying system, the silicon wafer rejecting device of the embodiment of the utility model comprises a rack, a swing frame, a conveying assembly and a telescopic assembly, and the rack is provided with a first friction...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI HONG, ZHU LIANG, ZHANG JIANGSHUI, WANG JUN, XIE LONGHUI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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