Translation vacuum chamber

The utility model discloses a translation vacuum chamber which comprises a bottom frame and a vacuum chamber body fixedly installed on the bottom frame, a substrate inlet and a substrate outlet are formed in the side wall of the same side of the vacuum chamber body, and a substrate translation mecha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YUAN SHUAI, YANG HONG, LI ZAN, ZHANG QIAO, SHU YI, HOU YIJIE, LIU GUANGDOU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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