Translation vacuum chamber

The utility model discloses a translation vacuum chamber which comprises a bottom frame and a vacuum chamber body fixedly installed on the bottom frame, a substrate inlet and a substrate outlet are formed in the side wall of the same side of the vacuum chamber body, and a substrate translation mecha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YUAN SHUAI, YANG HONG, LI ZAN, ZHANG QIAO, SHU YI, HOU YIJIE, LIU GUANGDOU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a translation vacuum chamber which comprises a bottom frame and a vacuum chamber body fixedly installed on the bottom frame, a substrate inlet and a substrate outlet are formed in the side wall of the same side of the vacuum chamber body, and a substrate translation mechanism is arranged in the vacuum chamber body. The substrate translation mechanism comprises translation guide rails fixed on a bottom plate of the vacuum chamber body in parallel, a substrate frame transmission bracket matched with the translation guide rails, and a translation driving device for driving the substrate frame transmission bracket to move along the translation guide rails, and a magnetic guiding device is fixed at the upper end of the substrate frame transmission bracket; a plurality of groups of conveying rollers are arranged at the lower part of the substrate frame transmission bracket, and the vacuum motor drives the plurality of groups of conveying rollers to rotate and introduces or sends the subs