Spectral signal window replacing device and semiconductor equipment

The utility model relates to the technical field of semiconductors, and provides a spectral signal window replacing device and semiconductor equipment, and the spectral signal window replacing device comprises a driving assembly and a window body. The number of the window bodies is at least two, and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG WEI, XU WENZE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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