Spectral signal window replacing device and semiconductor equipment

Spectral signal window replacing device and semiconductor equipment

The utility model relates to the technical field of semiconductors, and provides a spectral signal window replacing device and semiconductor equipment, and the spectral signal window replacing device comprises a driving assembly and a window body. The number of the window bodies is at least two, and...

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Hauptverfasser: WANG WEI, XU WENZE
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator WANG WEI
XU WENZE
description The utility model relates to the technical field of semiconductors, and provides a spectral signal window replacing device and semiconductor equipment, and the spectral signal window replacing device comprises a driving assembly and a window body. The number of the window bodies is at least two, and each window body is connected with the driving assembly; and the driving assembly is used for driving each window body to move, so that one window body covers the spectral signal window. According to the utility model, the window body can be driven to move through the driving assembly, so that the switching of the window body can be quickly realized, on one hand, the replacement efficiency is greatly improved, and the abnormity can be quickly checked; and on the other hand, manual replacement is not needed in the replacement mode, the labor intensity is reduced, meanwhile, the downtime is shortened, the yield of a machine table is improved, and the production cost is reduced. 本实用新型涉及半导体技术领域，提供了一种光谱信号窗更换装置及半导体设备，光谱
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The number of the window bodies is at least two, and each window body is connected with the driving assembly; and the driving assembly is used for driving each window body to move, so that one window body covers the spectral signal window. 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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Spectral signal window replacing device and semiconductor equipment
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