Silicon wafer turnover device and silicon wafer conveying equipment

The utility model discloses a silicon wafer turnover device and silicon wafer conveying equipment, the silicon wafer turnover device comprises a rack, a driving belt wheel, a driven belt wheel and a conveying belt, the rack is provided with an arc-shaped supporting part; the driving belt wheel and t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU LIANG, ZHANG JIANGSHUI, WANG JUN, XIE LONGHUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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