Silicon wafer turnover device and silicon wafer conveying equipment

The utility model discloses a silicon wafer turnover device and silicon wafer conveying equipment, the silicon wafer turnover device comprises a rack, a driving belt wheel, a driven belt wheel and a conveying belt, the rack is provided with an arc-shaped supporting part; the driving belt wheel and the driven belt wheel are both arranged on the machine frame in a rotatable mode. The conveying belt is wound on the driving belt wheel and the driven belt wheel; wherein the supporting part is used for supporting the conveying belt, so that a silicon wafer on the conveying belt is turned over by a preset angle, and the number of the conveying belt is one. The silicon wafer turnover device provided by the embodiment of the utility model can improve the yield and quality of silicon wafers. 本实用新型公开了一种硅片翻转装置和硅片输送设备，所述硅片翻转装置包括机架、主动带轮、从动带轮和输送带，所述机架具有弧形的支撑部；所述主动带轮和所述从动带轮均可转动地设于所述机架上；所述输送带绕设于所述主动带轮和所述从动带轮上；其中，所述支撑部用于支撑所述输送带，以使所述输送带上的硅片翻转预设角度，所述输送带的数量为一个。本实用新型实施例的硅片翻转装置能够提高硅片的产量和质量。