Preheating device for PVD coating processing

The utility model relates to a preheating device for PVD (Physical Vapor Deposition) coating processing, which belongs to the technical field of coating equipment and comprises a coating machine main body, the lower surface of the upper end of the coating machine main body is fixedly connected with...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN CHANGSHENG, LIU HAITAO, ZHANG DAODA, LAI ZONGBIN, WU XIAOQUAN, WANG CHANGHUA, GUO CI, ZHU JIA, YANG RUIFENG, LIU ZEYU, ZENG XIAO
Format: Patent
Sprache:chi ; eng
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