PMC air source rack
The utility model relates to a PMC air source rack which comprises a main path, a first gate valve and a pressure regulating valve which are sequentially connected are arranged on the main path, the input end of the first gate valve is used for being communicated with an air source, the output end o...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a PMC air source rack which comprises a main path, a first gate valve and a pressure regulating valve which are sequentially connected are arranged on the main path, the input end of the first gate valve is used for being communicated with an air source, the output end of the pressure regulating valve is respectively communicated with a plurality of branches, the output end of each branch is used for being communicated with corresponding equipment in a PMC, and a gate valve is arranged on each branch. The gate valves are used for controlling communication of the branches and the main path, and the pressure regulating valves are used for regulating the output pressure of the main path. The gate valves of the PMC air source rack can control communication of the branch circuits and the main circuit, the pressure regulating valves can regulate output pressure of the main circuit so as to meet air source requirements of corresponding PMC devices communicated with different branch circu |
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