Wafer revolving platform

The utility model aims to provide the wafer revolving platform which has the advantages of compact structure, wafer protection function and better positioning effect. The wafer rotation platform comprises a wafer, the wafer is covered on a blue film of a wafer iron ring, the wafer rotation platform...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HU XUEAN, LI HUI, QIU HUANMING, CHEN YUN, YU QINGHUA, SONG BINJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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