Wafer revolving platform

Wafer revolving platform

The utility model aims to provide the wafer revolving platform which has the advantages of compact structure, wafer protection function and better positioning effect. The wafer rotation platform comprises a wafer, the wafer is covered on a blue film of a wafer iron ring, the wafer rotation platform...

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Hauptverfasser: HU XUEAN, LI HUI, QIU HUANMING, CHEN YUN, YU QINGHUA, SONG BINJIE
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator HU XUEAN
LI HUI
QIU HUANMING
CHEN YUN
YU QINGHUA
SONG BINJIE
description The utility model aims to provide the wafer revolving platform which has the advantages of compact structure, wafer protection function and better positioning effect. The wafer rotation platform comprises a wafer, the wafer is covered on a blue film of a wafer iron ring, the wafer rotation platform comprises a direct-drive rotary table, an adsorption module is arranged at the action end of the direct-drive rotary table, a plurality of clamping jaw modules are symmetrically arranged on the edge side of the adsorption module, each clamping jaw module comprises an installation part and a swing rotation air cylinder, and the swing rotation air cylinders are arranged on the installation parts. One end of the mounting part is connected with the edge side of the adsorption module, the swing rotating air cylinder is connected to one end of the mounting part, the two ends of a rotating shaft of the swing rotating air cylinder are connected with rotating arms, the rotating arms are connected with pressing pieces, and t
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Wafer revolving platform
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