Jig suitable for position teaching of mechanical arm in semiconductor equipment

The utility model provides a jig suitable for teaching the position of a mechanical arm in semiconductor equipment, which is a jig suitable for teaching the position of the mechanical arm in the semiconductor equipment and comprises a transparent material jig and a wafer positioning jig, the wafer p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI SHANLONG, ZHAI JUNMING, ZHANG CHANGYONG, SUN YUZHONG, CHEN XINGLONG, XIA SHIWEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADVERTISING APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND,DEAF OR MUTE BASIC ELECTRIC ELEMENTS CRYPTOGRAPHY DIAGRAMS DISPLAY EDUCATION EDUCATIONAL OR DEMONSTRATION APPLIANCES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLOBES PHYSICS PLANETARIA SEALS SEMICONDUCTOR DEVICES
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