Jig suitable for position teaching of mechanical arm in semiconductor equipment

The utility model provides a jig suitable for teaching the position of a mechanical arm in semiconductor equipment, which is a jig suitable for teaching the position of the mechanical arm in the semiconductor equipment and comprises a transparent material jig and a wafer positioning jig, the wafer positioning jig is used for positioning a wafer, and the transparent material jig is used for clamping the wafer; the shape of the transparent wafer jig is the same as that of a wafer, the transparent wafer jig is a perfect-circle-shaped flat plate, and a center hole is formed in the center of the transparent wafer jig. According to the utility model, the teaching precision of an operator in teaching different positions can be greatly improved, and the teaching time can be saved. 本实用新型提供一种适合半导体设备内部机械手臂位置示教的治具，其为适合半导体设备内部机械手臂位置示教的治具，其包括透明材质治具和晶圆定位治具，晶圆定位治具用于定位晶圆，透明材质治具用于夹持晶圆；透明晶圆治具与晶圆的形状相同，其为正圆形状的平板型，在中心位置设置有中心孔。本实用新型可以大幅提高操作人员在示教不同位置时的示教精度，还可以节省示教时间。