Epitaxial wafer washing water treatment device

The utility model provides an epitaxial wafer washing water treatment device. The epitaxial wafer washing water treatment device comprises a raw water tank, a coagulation tank, a filter, an anti-pollution UF membrane, a filtering water tank, a security filter and an RO membrane, wherein all the components are connected through connecting pipelines; epitaxial wafer washing water is firstly stored in the raw water tank, then enters the coagulation tank for silicon precipitation, then is filtered by the filter, then passes through the anti-pollution UF membrane to remove suspended particles in the epitaxial wafer washing water, enters the filtering water tank, and finally enters the coagulation tank for silicon precipitation. And then the water enters the RO membrane through the security filter to be subjected to deionizing filtration. The novel epitaxial wafer tail gas washing water treatment process has the beneficial effects that the epitaxial tail gas washing water is recycled, and the treated water quality