Doping process demonstration device

The utility model discloses a doping process demonstration device, which comprises an ion generator model arranged at the upper part, an ion accelerating tube model arranged at the lower part, a magnetic analyzer model connected between one side of the ion generator model and the upper end of the ion accelerating tube model, and a substrate bearing platform model connected to the lower end of the ion accelerating tube model, the magnetic analyzer model comprises a display screen arranged on the front side, the display screen is used for playing a dynamic video of the moving track of the ion beam, and the dynamic video is used for simulating the screening process of the ion beam. The chip doping step teaching demonstration device is simple in structure, can be used for teaching demonstration of doping steps in a chip manufacturing process, and has a good teaching effect. 本实用新型公开了一种掺杂工艺演示装置，包括有设置在上方的离子发生器模型、设置在下方的离子加速管模型、连接于离子发生器模型一侧和离子加速管模型上端之间的磁分析器模型、连接于离子加速管模型下端的基片承载台模型，所述磁分析器模型包括有设置在前侧的显示屏，所述显示屏用于播放离子束的运行轨迹