AMAT 300MM TXZ CHAMBER novel edge ring
According to the novel AMAT 300MM TXZ CHAMBER edge ring, the edge ring is arranged to be annular, the outer diameter of the edge ring is 347.84 mm, and the inner diameter of the edge ring is 296.55 mm; compared with the traditional design, the scheme has the advantages that the trouble of fixing by...
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| creator | YU SUZHEN |
| description | According to the novel AMAT 300MM TXZ CHAMBER edge ring, the edge ring is arranged to be annular, the outer diameter of the edge ring is 347.84 mm, and the inner diameter of the edge ring is 296.55 mm; compared with the traditional design, the scheme has the advantages that the trouble of fixing by using three screws is saved, maintenance personnel save trouble and time, the time is shortened, the equipment production time is prolonged, and the equipment utilization rate is improved; according to the scheme, the edge ring is thicker, the processing difficulty is reduced, the edge ring is not easy to deform at a high temperature, and the phenomena of inner side deformation and upwarp caused by the high temperature and uneven heating caused by jacking of a wafer are avoided, so that the thickness uniformity problem of the CVD titanium nitride process is improved, and the problems of equipment alarm and product scrapping are solved; the cleaning frequency of the product is increased, the service life of parts is |
| format | Patent |
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according to the scheme, the edge ring is thicker, the processing difficulty is reduced, the edge ring is not easy to deform at a high temperature, and the phenomena of inner side deformation and upwarp caused by the high temperature and uneven heating caused by jacking of a wafer are avoided, so that the thickness uniformity problem of the CVD titanium nitride process is improved, and the problems of equipment alarm and product scrapping are solved; the cleaning frequency of the product is increased, the service life of parts is</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; FERROUS OR NON-FERROUS ALLOYS ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; PRETREATMENT OF RAW MATERIALS ; PRODUCTION AND REFINING OF METALS ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TREATMENT OF ALLOYS OR NON-FERROUS METALS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230606&DB=EPODOC&CC=CN&NR=219136870U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230606&DB=EPODOC&CC=CN&NR=219136870U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YU SUZHEN</creatorcontrib><title>AMAT 300MM TXZ CHAMBER novel edge ring</title><description>According to the novel AMAT 300MM TXZ CHAMBER edge ring, the edge ring is arranged to be annular, the outer diameter of the edge ring is 347.84 mm, and the inner diameter of the edge ring is 296.55 mm; 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compared with the traditional design, the scheme has the advantages that the trouble of fixing by using three screws is saved, maintenance personnel save trouble and time, the time is shortened, the equipment production time is prolonged, and the equipment utilization rate is improved; according to the scheme, the edge ring is thicker, the processing difficulty is reduced, the edge ring is not easy to deform at a high temperature, and the phenomena of inner side deformation and upwarp caused by the high temperature and uneven heating caused by jacking of a wafer are avoided, so that the thickness uniformity problem of the CVD titanium nitride process is improved, and the problems of equipment alarm and product scrapping are solved; the cleaning frequency of the product is increased, the service life of parts is</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRETREATMENT OF RAW MATERIALS PRODUCTION AND REFINING OF METALS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF ALLOYS OR NON-FERROUS METALS |
| title | AMAT 300MM TXZ CHAMBER novel edge ring |
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