Semi-automatic manipulator capable of lifting up and down and rotating back and forth and rotating wafer in groove

The utility model relates to the technical field of wafer cleaning, in particular to an up-down lifting and front-back rotating in-groove wafer rotating semi-automatic manipulator which comprises a lifting mechanism, a front-back rotating mechanism and an in-groove wafer rotating mechanism. The top...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GU QUANMING, ZUO GUOJUN, FU ZHENGCHAO, CHENG XU, REN JINZHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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