Shading device for silicon wafer delivery box inductive sensor

Shading device for silicon wafer delivery box inductive sensor

The utility model discloses a shading device for an inductive sensor of a silicon wafer delivery box. The shading device comprises a fixed plate and a shading plate, a concentric-square-shaped groove completely penetrating through the two opposite side faces is formed in the fixing plate, and a bead...

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Hauptverfasser: ZHONG YOUSHENG, WU HONGMING, ZHANG LI
Format: Patent
Sprache:chi ; eng
Schlagworte:
DETECTING MASSES OR OBJECTS
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
MEASURING
PHYSICS
TESTING
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creator ZHONG YOUSHENG
WU HONGMING
ZHANG LI
description The utility model discloses a shading device for an inductive sensor of a silicon wafer delivery box. The shading device comprises a fixed plate and a shading plate, a concentric-square-shaped groove completely penetrating through the two opposite side faces is formed in the fixing plate, and a bead screw and an elastic glass bead located at the bottom of the bead screw are arranged in the portion, at the top of the concentric-square-shaped groove, of the fixing plate; the shading plate is located in the concentric-square-shaped groove, and a shading limiting clamping groove and a static limiting clamping groove which are matched with the elastic glass beads are formed in the shading plate. According to the shading device provided by the invention, the problem that particles are easily adsorbed at the sticking position due to the fact that the photosensitive hole is stuck by a label in the prior art is solved, the production time is saved, and the yield and the production efficiency of silicon wafers are impr
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subjects DETECTING MASSES OR OBJECTS
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
MEASURING
PHYSICS
TESTING
title Shading device for silicon wafer delivery box inductive sensor
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