Dicing blade eccentricity eliminating device and dicing saw
The utility model discloses a scribing cutter eccentricity eliminating device, which relates to the technical field of semiconductor processing and comprises an expansion jackscrew and a cutter flange, and a tiny gap still exists when a blade is sleeved on the cutter flange. A conical face capable o...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a scribing cutter eccentricity eliminating device, which relates to the technical field of semiconductor processing and comprises an expansion jackscrew and a cutter flange, and a tiny gap still exists when a blade is sleeved on the cutter flange. A conical face capable of being matched with an expansion jackscrew is arranged in an inner cavity of the head end of the cutter flange, and when the expansion jackscrew is installed in the cutter flange and moves in the axial direction, due to the fact that the inner diameter of the inner cavity of the head end is gradually reduced towards the tail end, and the outer diameter of the expansion jackscrew is not changed, the expansion jackscrew exerts radial expansion acting force on the periphery of the inner cavity of the cutter flange. The periphery of the cutter flange elastically deforms and expands outwards, the outer diameter of the position, corresponding to the blade, of the cutter flange is increased, the periphery of the cutter f |
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