Large-size upper table frame module opening mechanism

The utility model discloses a large-size upper frame module opening mechanism which comprises an upper frame module and a lower frame module which are arranged in an inner cavity of an exposure machine, the lower frame module is arranged at the bottom of the inner cavity of the exposure machine, one...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAN DONG, ZHANG HONGYANG, HAO QINGHUI, TONG JIAYUAN, YU QIUHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a large-size upper frame module opening mechanism which comprises an upper frame module and a lower frame module which are arranged in an inner cavity of an exposure machine, the lower frame module is arranged at the bottom of the inner cavity of the exposure machine, one side of the lower frame module is provided with an overturning seat, one side of the upper frame module is hinged and fixed with the overturning seat, and the other side of the upper frame module is hinged and fixed with the overturning seat. Lower hinged supports are arranged in the middles of the two sides of the upper end of the upper frame module, upper hinged supports are arranged on the two sides of the top of an inner cavity of the exposure machine, a pull-up telescopic air cylinder is arranged between the corresponding lower hinged support and the upper hinged support, and the two ends of the pull-up telescopic air cylinder are fixedly hinged to the lower hinged support and the upper hinged support respect