Vacuum cavity

The utility model relates to a vacuum cavity. A top plate is arranged above the vacuum cavity; a bottom plate is arranged below the vacuum cavity; an air exhaust interface flange is arranged on the central axis of the top plate and the bottom plate; a cavity upper door frame is arranged on one side...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HU JIAZHOU, YANG YUANCAI, YANG ZHE, XIONG KAI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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