Micro-attitude device based on MEMS device
The micro-attitude device based on the MEMS device comprises a shell structure and an MEMS sensing structure, the shell structure comprises an outer shell and a top cover arranged at the upper end of the outer shell, four vertical positioning columns are evenly distributed and connected to the inner...
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| creator | PAN SHUSHAN ZHAO XIAOZHEN GAO QIONG |
| description | The micro-attitude device based on the MEMS device comprises a shell structure and an MEMS sensing structure, the shell structure comprises an outer shell and a top cover arranged at the upper end of the outer shell, four vertical positioning columns are evenly distributed and connected to the inner bottom wall of the outer shell, mounting grooves are formed in the upper ends of the positioning columns, and the MEMS sensing structure is arranged in the mounting grooves. A circular groove corresponding to the mounting groove is formed in the upper end of the top cover, and a fastening screw fixed to the mounting groove is in threaded connection with the interior of the circular groove; the MEMS sensing structure comprises a transverse plate fixedly connected among the multiple positioning columns, a circuit substrate is fixedly connected to the center of the upper end of the transverse plate, an MEMS chip is connected to the center of the upper end of the circuit substrate, a protective bridge is arranged on t |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN218673676UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN218673676UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN218673676UU3</originalsourceid><addsrcrecordid>eNrjZNDyzUwuytdNLCnJLClNSVVISS3LTE5VSEosTk1RyM9T8HX1DYYK8jCwpiXmFKfyQmluBiU31xBnD93Ugvz41OKCxOTUvNSSeGc_I0MLM3NjM3Oz0FBjohQBADWmKRo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Micro-attitude device based on MEMS device</title><source>esp@cenet</source><creator>PAN SHUSHAN ; ZHAO XIAOZHEN ; GAO QIONG</creator><creatorcontrib>PAN SHUSHAN ; ZHAO XIAOZHEN ; GAO QIONG</creatorcontrib><description>The micro-attitude device based on the MEMS device comprises a shell structure and an MEMS sensing structure, the shell structure comprises an outer shell and a top cover arranged at the upper end of the outer shell, four vertical positioning columns are evenly distributed and connected to the inner bottom wall of the outer shell, mounting grooves are formed in the upper ends of the positioning columns, and the MEMS sensing structure is arranged in the mounting grooves. A circular groove corresponding to the mounting groove is formed in the upper end of the top cover, and a fastening screw fixed to the mounting groove is in threaded connection with the interior of the circular groove; the MEMS sensing structure comprises a transverse plate fixedly connected among the multiple positioning columns, a circuit substrate is fixedly connected to the center of the upper end of the transverse plate, an MEMS chip is connected to the center of the upper end of the circuit substrate, a protective bridge is arranged on t</description><language>chi ; eng</language><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GYROSCOPIC INSTRUMENTS ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; NAVIGATION ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; PRINTED CIRCUITS ; SURVEYING ; TESTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230321&DB=EPODOC&CC=CN&NR=218673676U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230321&DB=EPODOC&CC=CN&NR=218673676U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>PAN SHUSHAN</creatorcontrib><creatorcontrib>ZHAO XIAOZHEN</creatorcontrib><creatorcontrib>GAO QIONG</creatorcontrib><title>Micro-attitude device based on MEMS device</title><description>The micro-attitude device based on the MEMS device comprises a shell structure and an MEMS sensing structure, the shell structure comprises an outer shell and a top cover arranged at the upper end of the outer shell, four vertical positioning columns are evenly distributed and connected to the inner bottom wall of the outer shell, mounting grooves are formed in the upper ends of the positioning columns, and the MEMS sensing structure is arranged in the mounting grooves. A circular groove corresponding to the mounting groove is formed in the upper end of the top cover, and a fastening screw fixed to the mounting groove is in threaded connection with the interior of the circular groove; the MEMS sensing structure comprises a transverse plate fixedly connected among the multiple positioning columns, a circuit substrate is fixedly connected to the center of the upper end of the transverse plate, an MEMS chip is connected to the center of the upper end of the circuit substrate, a protective bridge is arranged on t</description><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GYROSCOPIC INSTRUMENTS</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>NAVIGATION</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>PRINTED CIRCUITS</subject><subject>SURVEYING</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNDyzUwuytdNLCnJLClNSVVISS3LTE5VSEosTk1RyM9T8HX1DYYK8jCwpiXmFKfyQmluBiU31xBnD93Ugvz41OKCxOTUvNSSeGc_I0MLM3NjM3Oz0FBjohQBADWmKRo</recordid><startdate>20230321</startdate><enddate>20230321</enddate><creator>PAN SHUSHAN</creator><creator>ZHAO XIAOZHEN</creator><creator>GAO QIONG</creator><scope>EVB</scope></search><sort><creationdate>20230321</creationdate><title>Micro-attitude device based on MEMS device</title><author>PAN SHUSHAN ; ZHAO XIAOZHEN ; GAO QIONG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN218673676UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GYROSCOPIC INSTRUMENTS</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>NAVIGATION</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>PRINTED CIRCUITS</topic><topic>SURVEYING</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>PAN SHUSHAN</creatorcontrib><creatorcontrib>ZHAO XIAOZHEN</creatorcontrib><creatorcontrib>GAO QIONG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>PAN SHUSHAN</au><au>ZHAO XIAOZHEN</au><au>GAO QIONG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Micro-attitude device based on MEMS device</title><date>2023-03-21</date><risdate>2023</risdate><abstract>The micro-attitude device based on the MEMS device comprises a shell structure and an MEMS sensing structure, the shell structure comprises an outer shell and a top cover arranged at the upper end of the outer shell, four vertical positioning columns are evenly distributed and connected to the inner bottom wall of the outer shell, mounting grooves are formed in the upper ends of the positioning columns, and the MEMS sensing structure is arranged in the mounting grooves. A circular groove corresponding to the mounting groove is formed in the upper end of the top cover, and a fastening screw fixed to the mounting groove is in threaded connection with the interior of the circular groove; the MEMS sensing structure comprises a transverse plate fixedly connected among the multiple positioning columns, a circuit substrate is fixedly connected to the center of the upper end of the transverse plate, an MEMS chip is connected to the center of the upper end of the circuit substrate, a protective bridge is arranged on t</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS PRINTED CIRCUITS SURVEYING TESTING |
| title | Micro-attitude device based on MEMS device |
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