Vacuum evaporation film forming device with demagnetization function

The utility model discloses a vacuum evaporation film forming device with a degaussing function, and relates to the field of vacuum coating, the vacuum evaporation film forming device comprises an emission mechanism used for emitting electron beams, and the emission mechanism comprises a lamp filame...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIANG YOUSONG, YANG YUN, WANG HUAIMIN, CAO XINSHENG, GU KANGXIN, ZHENG BINGWEI, CHENG XULI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a vacuum evaporation film forming device with a degaussing function, and relates to the field of vacuum coating, the vacuum evaporation film forming device comprises an emission mechanism used for emitting electron beams, and the emission mechanism comprises a lamp filament capable of emitting electrons after being electrified and a cover plate used for containing the lamp filament; the containing mechanism is used for containing an evaporation material; the electromagnet is used for generating a magnetic field; the scanning coil is arranged on the side, deviating from the containing mechanism, of the transmitting mechanism and used for providing a scanning magnetic field enabling the electron beams to scan on the surface of the containing mechanism; the first power supply module is connected with the electromagnet and used for supplying power to the electromagnet; the second power supply module is connected with the scanning coil and used for supplying power to the scanning coil;