Semiconductor device

A semiconductor device includes a vertical stack of channel members disposed over a substrate; a gate structure covering a periphery of each channel member of the vertical stack of channel members; and a source/drain feature disposed over the substrate and coupled to the vertical stack of channel me...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN JIABIN, LI WEIYANG, ZHENG KUANHAO, LIN BAISHAO, QIU ZIHUA, FAN WEIHAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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