Novel getter testing system
The utility model relates to the technical field of getter testing, and provides a novel getter testing system which comprises a getter sample chamber, and a vacuumizing module, a baking module, a heating activation module, a hydrogen control module and a vacuum degree measuring module which are use...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of getter testing, and provides a novel getter testing system which comprises a getter sample chamber, and a vacuumizing module, a baking module, a heating activation module, a hydrogen control module and a vacuum degree measuring module which are used for testing, the mode that one end of the capillary tube is directly connected with the getter sample chamber is adopted, after a getter sample is heated and activated, hydrogen is controlled to directly enter the getter sample chamber through the capillary tube at a constant speed, and the link that in the prior art, gas needs to be introduced into another cavity firstly, and then hydrogen enters the sample chamber through the capillary tube in a pressure stabilizing mode is omitted; compared with the prior art, the air suction rate and the air suction amount are measured, the problem that the operation failure rate is high due to the fact that current equipment is complex is solved, parameters are provided for |
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