Temperature sensing automatic tracking system and silicon carbide crystal growth equipment
The utility model provides a temperature sensing automatic tracking system and silicon carbide crystal growth equipment. The system comprises a controller; the temperature acquisition device is arranged on the silicon carbide crystal growth equipment and is used for acquiring the temperature of a he...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a temperature sensing automatic tracking system and silicon carbide crystal growth equipment. The system comprises a controller; the temperature acquisition device is arranged on the silicon carbide crystal growth equipment and is used for acquiring the temperature of a heating raw material of the crucible; the mobile device is connected with the temperature acquisition device and controls the temperature acquisition device to move, and when the mobile device receives correction data of the temperature acquisition result transmitted by the controller, the mobile device controls the temperature acquisition device to move so as to correct the temperature acquisition position of the temperature acquisition device on the heating raw material of the crucible. Therefore, the temperature sensing accuracy in the crystal growth process can be improved through automatic temperature sensing tracking correction, manual misjudgment can be avoided without manual monitoring, the crystal growth pro |
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