Lithography light source lamp with light supplementing function

The utility model provides a lithography light source lamp with a light supplementing function, and belongs to the technical field of illumination light sources. The device comprises a shell, a lithography light source assembly, a light supplementing plate, a condensing lens and a light diffusing pi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAN YULIN, DAI MINGWEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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