Plant fresh air process exhaust arrangement system with fresh air machine room exhausting air at two ends of ridge
The utility model discloses a plant fresh air process exhaust arrangement system for exhausting air at two ends of a ridge of a fresh air machine room, the arrangement mode is suitable for a chip manufacturing plant with a large length-width ratio, the arrangement mode comprises the design of a sing...
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| creator | BAI YAN YANG LI GONG WEILI YAO ZHEQING HAN MINJUAN |
| description | The utility model discloses a plant fresh air process exhaust arrangement system for exhausting air at two ends of a ridge of a fresh air machine room, the arrangement mode is suitable for a chip manufacturing plant with a large length-width ratio, the arrangement mode comprises the design of a single-star or binary-star chip manufacturing plant, and a core clean fresh air machine room is integrally arranged on the ridge of a clean area; the process exhaust equipment is arranged on the roofs of the supporting areas at the two ends along the short edges, and the exhaust areas and the MAU room are arranged in the vertical direction; a process exhaust main pipe is arranged in a technical interlayer truss on a clean area, and the design that in the prior art, an MAU machine room is arranged on the fourth layer of a long-edge supporting area of a workshop or in a truss layer of the clean area, and an exhaust equipment area is arranged on a long-edge roof and is parallel to the MAU machine room is changed. Accordin |
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Accordin</description><language>chi ; eng</language><subject>AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING ; BLASTING ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; RANGES ; VENTILATING ; WEAPONS</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221115&DB=EPODOC&CC=CN&NR=217817260U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221115&DB=EPODOC&CC=CN&NR=217817260U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BAI YAN</creatorcontrib><creatorcontrib>YANG LI</creatorcontrib><creatorcontrib>GONG WEILI</creatorcontrib><creatorcontrib>YAO ZHEQING</creatorcontrib><creatorcontrib>HAN MINJUAN</creatorcontrib><title>Plant fresh air process exhaust arrangement system with fresh air machine room exhausting air at two ends of ridge</title><description>The utility model discloses a plant fresh air process exhaust arrangement system for exhausting air at two ends of a ridge of a fresh air machine room, the arrangement mode is suitable for a chip manufacturing plant with a large length-width ratio, the arrangement mode comprises the design of a single-star or binary-star chip manufacturing plant, and a core clean fresh air machine room is integrally arranged on the ridge of a clean area; the process exhaust equipment is arranged on the roofs of the supporting areas at the two ends along the short edges, and the exhaust areas and the MAU room are arranged in the vertical direction; a process exhaust main pipe is arranged in a technical interlayer truss on a clean area, and the design that in the prior art, an MAU machine room is arranged on the fourth layer of a long-edge supporting area of a workshop or in a truss layer of the clean area, and an exhaust equipment area is arranged on a long-edge roof and is parallel to the MAU machine room is changed. 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Accordin</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING HEATING LIGHTING MECHANICAL ENGINEERING RANGES VENTILATING WEAPONS |
| title | Plant fresh air process exhaust arrangement system with fresh air machine room exhausting air at two ends of ridge |
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