Target disc lifting appliance of ion implanter and ion implanter

The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an ion implanter. The utility model aims to provide an ion implanter target disc lifting appliance and an ion implanter. The target disc lifting appliance and the ion implanter can save manpow...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU PENGFEI, ZHAO CHAO, LI DONGPING, LEE HEE-DAM, ZHANG YU, HE HAOYONG, DONG SHAOLONG, CHI JUNYU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CRANES ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HAULING HOISTING LIFTING LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS,WINCHES, OR TACKLES PERFORMING OPERATIONS TRANSPORTING
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