Target disc lifting appliance of ion implanter and ion implanter

The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an ion implanter. The utility model aims to provide an ion implanter target disc lifting appliance and an ion implanter. The target disc lifting appliance and the ion implanter can save manpow...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LIU PENGFEI, ZHAO CHAO, LI DONGPING, LEE HEE-DAM, ZHANG YU, HE HAOYONG, DONG SHAOLONG, CHI JUNYU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an ion implanter. The utility model aims to provide an ion implanter target disc lifting appliance and an ion implanter. The target disc lifting appliance and the ion implanter can save manpower and time for disassembling and assembling a target disc. The target disc lifting appliance of the ion implanter comprises a connecting arm assembly and a target disc connecting plate, the connecting arm assembly comprises a connecting arm, and an injection machine connecting part and a connecting plate connecting part which are respectively arranged at two ends of the connecting arm; the target disc connecting plate comprises a target disc connecting part and at least one groove formed in the connecting surface of the target disc connecting part, and a connecting hole used for being connected with a target disc is formed in the groove; and the connecting plate connecting part is connected with the target disc co