Laser-induced graphene in-situ processing detection device based on scanning electron microscope

The utility model relates to a laser-induced graphene in-situ processing detection device based on a scanning electron microscope, and belongs to the technical field of laser processing and material performance in-situ detection. The collimator and the beam expander are integrated in the box body, t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU XIN, GAO CHENCHEN, ZHANG QIXUN, SUN BINGHUA, FEI DING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to a laser-induced graphene in-situ processing detection device based on a scanning electron microscope, and belongs to the technical field of laser processing and material performance in-situ detection. The collimator and the beam expander are integrated in the box body, the box body is connected with the second flange through the first flange, the second flange is connected with the connecting sleeve, the sliding rail is installed on the inner wall of the connecting sleeve, the sliding rail is matched with the sliding block, the sliding block is fixedly connected with the connecting rod, and the field lens is fixed to the end of the connecting rod. The power source end of the second ball screw is fixedly connected with the exterior of the connecting sleeve, the transmission end of the second ball screw is connected with the baffle, and the baffle is fixedly connected with the connecting rod. The laser distance measuring sensor is fixedly connected with the power source end of the s