Wafer film expanding machine

The utility model discloses a wafer film expanding machine, which comprises a base, a film expanding piece, a lifting cylinder and a wafer ring, the film expanding piece is arranged on the base, one surface of the film expanding piece, which is deviated from the base, is provided with a circular bul...

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Hauptverfasser: LIU YAOLIN, XIA ZHIYONG, WEN YEFENG, FANG MINGDENG, DENG HUIJIAN
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Sprache:chi ; eng
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creator LIU YAOLIN
XIA ZHIYONG
WEN YEFENG
FANG MINGDENG
DENG HUIJIAN
description The utility model discloses a wafer film expanding machine, which comprises a base, a film expanding piece, a lifting cylinder and a wafer ring, the film expanding piece is arranged on the base, one surface of the film expanding piece, which is deviated from the base, is provided with a circular bulge, the lifting cylinder is arranged on the base, the wafer ring is connected with the lifting cylinder, and the wafer ring is positioned on one side of the circular bulge, which is deviated from the base. The wafer ring is arranged corresponding to the circular protrusion, the inner diameter of the wafer ring is larger than the outer diameter of the circular protrusion, and the wafer ring can move relative to the film expanding part to the circular protrusion to support the blue film of the wafer ring under the action of the lifting air cylinder so that the blue film can be expanded. According to the wafer film expanding machine provided by the embodiment of the utility model, the blue film can be expanded only by
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language chi ; eng
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Wafer film expanding machine
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