Constant-temperature heater for electrostatic chuck of photoetching machine

The utility model discloses a constant-temperature heater for an electrostatic chuck of a photoetching machine. The constant-temperature heater comprises a support frame, a connecting mechanism is arranged at the top of the supporting frame, a heating disc is installed at the top of the connecting m...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: XIE XINFENG, ZHANG XIAOWEI, XUE YAN, ZHU YUNWEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model discloses a constant-temperature heater for an electrostatic chuck of a photoetching machine. The constant-temperature heater comprises a support frame, a connecting mechanism is arranged at the top of the supporting frame, a heating disc is installed at the top of the connecting mechanism, and a cooling mechanism is installed on one side of the top of the supporting frame; the connecting mechanism is arranged at the top of the supporting frame, when the device is used for a long time and the interiors of the heating plates break down, a worker pulls the heating plates to separate the contact plates and the contacts at the bottoms of the heating plates, then the worker can take down the heating plates for maintenance, and then the other set of heating plates are placed on the supporting frame for use; a cooling mechanism is installed on one side of the top of the supporting frame, after the suction cup is heated, a heating disc is driven to move through a sliding block, and when a contact pl