High-productivity vertical furnace

The utility model discloses a high-productivity vertical furnace which comprises a furnace body, a gas supply system, a vacuum system, a vertical loading mechanism, an internal heating part, a process pipe, a carrier boat and a heat insulation supporting assembly, wherein the internal heating part,...

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Bibliographische Detailangaben
Hauptverfasser:	ZHAO ZHIRAN, ZHOU YOUCHENG, CHENG QIUYUN, GUO YAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The utility model discloses a high-productivity vertical furnace which comprises a furnace body, a gas supply system, a vacuum system, a vertical loading mechanism, an internal heating part, a process pipe, a carrier boat and a heat insulation supporting assembly, wherein the internal heating part, the process pipe, the carrier boat and the heat insulation supporting assembly are installed in the furnace body. The furnace body is of a vertical furnace structure, a furnace door assembly is arranged on the furnace body, and the vertical loading mechanism is used for being connected with the furnace door assembly and used for opening, closing and sealing a furnace door in the furnace door assembly. The carrier boat is arranged on the heat insulation supporting assembly; the gas supply system is used for providing gas required by an equipment technological process into the furnace body; the vacuum system is used for providing a vacuum atmosphere in the furnace body; more than two groups of carrier boats are provi