Blue film tension degree adjusting device and splitting equipment

The utility model utility relates to the technical field of LED wafer processing, in particular to a blue film tension degree adjusting device and splitting equipment. The blue film tension degree adjusting device comprises a table plate, a supporting plate and a receiving table assembly. The suppor...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN JUNBO, YU JUNHUA, HUANG SHAOHU, LIU YOUYUE, GAO YUNFENG, NIE KUNSHEN, ZHOU FUHAI, YIN JIANGANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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