Multi-channel testing device applied to probe station

Multi-channel testing device applied to probe station

The utility model relates to a multichannel testing device applied to a probe station. Comprising a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a working...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TIAN TENGTENG, LIU WEI, LYU WENBO, ZHANG HAIYANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator TIAN TENGTENG
LIU WEI
LYU WENBO
ZHANG HAIYANG
description The utility model relates to a multichannel testing device applied to a probe station. Comprising a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a working cavity in the working table; the microscope displacement table comprises a three-axis displacement assembly, and a microscope mechanism is arranged at the front end of the three-axis displacement assembly; the probe card overturning displacement table comprises a probe card Y-axis displacement assembly and a plurality of probe card X-axis displacement assemblies; the plurality of probe card X-axis displacement assemblies are arranged on the probe card Y-axis displacement assembly in a sliding manner through a probe card overturning mechanism; a plurality of probe card mechanisms are arranged on the plurality of probe card X-axis displacement assemblies in a sliding manner, and each probe card mechanism comprises a
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN215493960UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN215493960UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN215493960UU3</originalsourceid><addsrcrecordid>eNrjZDD1Lc0pydRNzkjMy0vNUShJLS7JzEtXSEkty0xOVUgsKMjJTE1RKMlXKCjKT0pVKC5JLMnMz-NhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfHOfkaGpiaWxpZmBqGhxkQpAgDPyS4Z</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Multi-channel testing device applied to probe station</title><source>esp@cenet</source><creator>TIAN TENGTENG ; LIU WEI ; LYU WENBO ; ZHANG HAIYANG</creator><creatorcontrib>TIAN TENGTENG ; LIU WEI ; LYU WENBO ; ZHANG HAIYANG</creatorcontrib><description>The utility model relates to a multichannel testing device applied to a probe station. Comprising a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a working cavity in the working table; the microscope displacement table comprises a three-axis displacement assembly, and a microscope mechanism is arranged at the front end of the three-axis displacement assembly; the probe card overturning displacement table comprises a probe card Y-axis displacement assembly and a plurality of probe card X-axis displacement assemblies; the plurality of probe card X-axis displacement assemblies are arranged on the probe card Y-axis displacement assembly in a sliding manner through a probe card overturning mechanism; a plurality of probe card mechanisms are arranged on the plurality of probe card X-axis displacement assemblies in a sliding manner, and each probe card mechanism comprises a</description><language>chi ; eng</language><subject>MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20220111&amp;DB=EPODOC&amp;CC=CN&amp;NR=215493960U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20220111&amp;DB=EPODOC&amp;CC=CN&amp;NR=215493960U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TIAN TENGTENG</creatorcontrib><creatorcontrib>LIU WEI</creatorcontrib><creatorcontrib>LYU WENBO</creatorcontrib><creatorcontrib>ZHANG HAIYANG</creatorcontrib><title>Multi-channel testing device applied to probe station</title><description>The utility model relates to a multichannel testing device applied to a probe station. Comprising a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a working cavity in the working table; the microscope displacement table comprises a three-axis displacement assembly, and a microscope mechanism is arranged at the front end of the three-axis displacement assembly; the probe card overturning displacement table comprises a probe card Y-axis displacement assembly and a plurality of probe card X-axis displacement assemblies; the plurality of probe card X-axis displacement assemblies are arranged on the probe card Y-axis displacement assembly in a sliding manner through a probe card overturning mechanism; a plurality of probe card mechanisms are arranged on the plurality of probe card X-axis displacement assemblies in a sliding manner, and each probe card mechanism comprises a</description><subject>MEASURING</subject><subject>MEASURING ELECTRIC VARIABLES</subject><subject>MEASURING MAGNETIC VARIABLES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDD1Lc0pydRNzkjMy0vNUShJLS7JzEtXSEkty0xOVUgsKMjJTE1RKMlXKCjKT0pVKC5JLMnMz-NhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfHOfkaGpiaWxpZmBqGhxkQpAgDPyS4Z</recordid><startdate>20220111</startdate><enddate>20220111</enddate><creator>TIAN TENGTENG</creator><creator>LIU WEI</creator><creator>LYU WENBO</creator><creator>ZHANG HAIYANG</creator><scope>EVB</scope></search><sort><creationdate>20220111</creationdate><title>Multi-channel testing device applied to probe station</title><author>TIAN TENGTENG ; LIU WEI ; LYU WENBO ; ZHANG HAIYANG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN215493960UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>MEASURING</topic><topic>MEASURING ELECTRIC VARIABLES</topic><topic>MEASURING MAGNETIC VARIABLES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>TIAN TENGTENG</creatorcontrib><creatorcontrib>LIU WEI</creatorcontrib><creatorcontrib>LYU WENBO</creatorcontrib><creatorcontrib>ZHANG HAIYANG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>TIAN TENGTENG</au><au>LIU WEI</au><au>LYU WENBO</au><au>ZHANG HAIYANG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Multi-channel testing device applied to probe station</title><date>2022-01-11</date><risdate>2022</risdate><abstract>The utility model relates to a multichannel testing device applied to a probe station. Comprising a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a working cavity in the working table; the microscope displacement table comprises a three-axis displacement assembly, and a microscope mechanism is arranged at the front end of the three-axis displacement assembly; the probe card overturning displacement table comprises a probe card Y-axis displacement assembly and a plurality of probe card X-axis displacement assemblies; the plurality of probe card X-axis displacement assemblies are arranged on the probe card Y-axis displacement assembly in a sliding manner through a probe card overturning mechanism; a plurality of probe card mechanisms are arranged on the plurality of probe card X-axis displacement assemblies in a sliding manner, and each probe card mechanism comprises a</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_CN215493960UU
source esp@cenet
subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Multi-channel testing device applied to probe station
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T11%3A54%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=TIAN%20TENGTENG&rft.date=2022-01-11&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN215493960UU%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true