Wet etching device for silicon wafer

The utility model provides a wet etching device for a silicon wafer, the silicon wafer is composed of a major arc section and a straight line section, the device comprises a support and a shell, etching liquid medicine is arranged in the shell, the shell is provided with an etching liquid medicine c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIAO XINHAI, QIAN SHAOBO, WANG YOUWEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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