一种防电弧基座
本实用新型公开了一种防电弧基座，包括有金属基座和玻璃基板，金属基座上围绕玻璃基板四周设有环形台阶，环形台阶的台阶面上分别设有首尾相对的多个绝缘条块，每个绝缘条块与环形台阶在相对的一侧之间分别具有间隙，相邻二个绝缘条块之间具有间隙；环形台阶的台阶面上分别设有多组定位孔，多组定位孔分别与多个绝缘条块一一对应，多个绝缘条块的底端分别固定连接有对应插入各组定位孔内的定位销柱，定位销柱分别通过弹性卡接件卡接在所在的定位孔内。本实用新型在金属基座的四周设置环形台阶，并在环形台阶上设置多个绝缘条块，在实施薄膜沉积的工艺过程中能够防止电弧的产生，保证了薄膜沉积工艺的正常进行，保障了安全生产。...
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| description | 本实用新型公开了一种防电弧基座，包括有金属基座和玻璃基板，金属基座上围绕玻璃基板四周设有环形台阶，环形台阶的台阶面上分别设有首尾相对的多个绝缘条块，每个绝缘条块与环形台阶在相对的一侧之间分别具有间隙，相邻二个绝缘条块之间具有间隙；环形台阶的台阶面上分别设有多组定位孔，多组定位孔分别与多个绝缘条块一一对应，多个绝缘条块的底端分别固定连接有对应插入各组定位孔内的定位销柱，定位销柱分别通过弹性卡接件卡接在所在的定位孔内。本实用新型在金属基座的四周设置环形台阶，并在环形台阶上设置多个绝缘条块，在实施薄膜沉积的工艺过程中能够防止电弧的产生，保证了薄膜沉积工艺的正常进行，保障了安全生产。 |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | 一种防电弧基座 |
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